Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311458 | Method for improving surface quality of alloy micro-area via supersaturated film and use thereof | Pengfei Guo, Jiachang Wang, Yansong Liu, Xin Lin, Hongbo Lan | 2025-05-27 |
| 10763179 | Non-contact method to monitor and quantify effective work function of metals | Dmitriy Marinskiy, Thye Chong Loy, Jacek Lagowski, Sung-Li Wang, Shyh-Shin Ferng +2 more | 2020-09-01 |
| 10276397 | CVD metal seed layer | Ya-Ling Lee, Victor Lu | 2019-04-30 |
| 10269560 | Atomic layer deposition method for manufacturing semiconductor structure | Yun-Tzu Chiu, Hsueh-Hui Kuo, Chih-Tsung Lee | 2019-04-23 |
| 10121653 | Bottom-up PEALD proces | Su-Horng Lin, Chi-Ming Yang | 2018-11-06 |
| 9869018 | Solid precursor delivery method using liquid solvent for thin film deposition | Chung-Chieh Lee, Chi-Ming Yang | 2018-01-16 |
| 9530617 | In-situ charging neutralization | Jyh-Shiou Hsu, Chi-Ming Yang | 2016-12-27 |
| 9331168 | Semiconductor structure and manufacuturing method of the same | Su-Horng Lin | 2016-05-03 |
| 9184045 | Bottom-up PEALD process | Su-Horng Lin, Chi-Ming Yang | 2015-11-10 |
| 8623468 | Methods of fabricating metal hard masks | Su-Horng Lin, Chi-Ming Yang, Chin-Hsiang Lin | 2014-01-07 |