Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658245 | Semiconductor device and method of manufacturing | — | 2023-05-23 |
| 11071513 | Test key design to enable X-ray scatterometry measurement | Chung-Li Huang, Yi-Hung Lin, Chungwei Wang | 2021-07-27 |
| 10763179 | Non-contact method to monitor and quantify effective work function of metals | Dmitriy Marinskiy, Thye Chong Loy, Jacek Lagowski, Sung-Li Wang, Lin-Jung Wu +2 more | 2020-09-01 |
| 10499876 | Test key design to enable X-ray scatterometry measurement | Chung-Li Huang, Yi-Hung Lin, Chungwei Wang | 2019-12-10 |
| 10151713 | X-ray reflectometry apparatus for samples with a miniscule measurement area and a thickness in nanometers and method thereof | Wen-Li Wu, Yun-San Chien, Wei-En Fu, Yi-Hung Lin | 2018-12-11 |