Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11071513 | Test key design to enable X-ray scatterometry measurement | Shyh-Shin Ferng, Chung-Li Huang, Yi-Hung Lin | 2021-07-27 |
| 10499876 | Test key design to enable X-ray scatterometry measurement | Shyh-Shin Ferng, Chung-Li Huang, Yi-Hung Lin | 2019-12-10 |