Issued Patents All Time
Showing 51–75 of 178 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199767 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Feng Yuan Hsu, Chyi Shyuan Chern, Tsiao-Chen Wu, Chun-Lin Chang | 2021-12-14 |
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Yen-Shuo Su +1 more | 2021-10-19 |
| 11153957 | Apparatus and method for generating an electromagnetic radiation | Tzu-Jeng Hsu, Chyi Shyuan Chern, Jui-Chun Peng, Heng-Hsin Liu, Chin-Hsiang Lin | 2021-10-19 |
| 11125968 | Optical module | Hui Wang | 2021-09-21 |
| 11086237 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu | 2021-08-10 |
| 11075097 | 3D IC bump height metrology APC | Nai-Han Cheng | 2021-07-27 |
| 11029324 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-05-18 |
| 11004746 | Method for forming a semiconductor structure using dehydrating chemical, and method for forming a semiconductor structure | Chung-Chieh Lee, Chyi Shyuan Chern | 2021-05-11 |
| 11003067 | Pressurized tin collection bucket with in-line draining mechanism | Hsin-Feng Chen, Li-Jui Chen | 2021-05-11 |
| 10991604 | Method of manufacturing semiconductor structure | Jyh-Shiou Hsu, Tzu-Jeng Hsu | 2021-04-27 |
| 10990026 | Lithography apparatus and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-04-27 |
| 10955750 | Lithography system and method thereof | Wei-Chun Yen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-03-23 |
| 10880981 | Collector pellicle | Shang-Chieh Chien, Jen-Yang Chung, Shao-Wei Luo, Tzung-Chi Fu, Chun-Kuang Chen +2 more | 2020-12-29 |
| 10880982 | Light generation system using metal-nonmetal compound as precursor and related light generation method | Ching-Hsiang Hsu, Feng Yuan Hsu, Hsu-Kai Chang | 2020-12-29 |
| 10877366 | Pressurized tin collection bucket with in-line draining mechanism | Hsin-Feng Chen, Li-Jui Chen | 2020-12-29 |
| 10877190 | Extreme ultraviolet radiation source | Sheng-Ta Lin, Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10875148 | Apparatus and methods for chemical mechanical polishing | He Hui Peng, James Jeng-Jyi Hwang, Yung-Yao Lee, Yen-Di Tsen | 2020-12-29 |
| 10875143 | Apparatus and methods for chemical mechanical polishing | James Jeng-Jyi Hwang, Jiann Lih Wu, He Hui Peng | 2020-12-29 |
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Shang-Chieh Chien +3 more | 2020-12-29 |
| 10877378 | Vessel for extreme ultraviolet radiation source | Ssu-Yu Chen, Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10859928 | EUV light source and apparatus for lithography | Yu-Chih Chen, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10857649 | Method and apparatus for performing a polishing process in semiconductor fabrication | Bo-I Lee, Huang Soon Kang, Chin-Hsiang Lin | 2020-12-08 |
| 10791616 | Radiation source apparatus | Ssu-Yu Chen, Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-09-29 |
| 10763117 | Semiconductor manufacturing apparatus and method thereof | Nai-Han Cheng | 2020-09-01 |