Issued Patents All Time
Showing 101–125 of 178 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10011918 | Apparatus and process of electro-chemical plating | Ying-Hsueh Changchien, Yu-Ming Lee | 2018-07-03 |
| 9958424 | Method of identifying airborne molecular contamination source | Tzu-Sou Chuang, Jeng-Jyi Hwang, Cheng-Lung Chou, Chin-Hsiang Lin | 2018-05-01 |
| 9929045 | Defect inspection and repairing method and associated system and non-transitory computer readable medium | Nai-Han Cheng | 2018-03-27 |
| 9892931 | Semiconductor manufacturing apparatus and method thereof | Nai-Han Cheng | 2018-02-13 |
| 9892954 | Wafer processing system using multi-zone chuck | Nai-Han Cheng, You-Hua Chou, Kuo-Sheng Chuang, Chin-Hsiang Lin | 2018-02-13 |
| 9869018 | Solid precursor delivery method using liquid solvent for thin film deposition | Chung-Chieh Lee, Lin-Jung Wu | 2018-01-16 |
| 9864270 | Pellicle and method for manufacturing the same | Jeng-Shin Ma, Tsiao-Chen Wu, Chyi Shyuan Chern, Chih-Cheng Lin, Yun-Yue Lin | 2018-01-09 |
| 9865429 | Ion implantation with charge and direction control | Chih-Hong Hwang, Chun-Lin Chang, Nai-Han Cheng, Chin-Hsiang Lin | 2018-01-09 |
| 9859139 | 3D IC bump height metrology APC | Nai-Han Cheng | 2018-01-02 |
| 9805913 | Ion beam dimension control for ion implantation process and apparatus, and advanced process control | Chih-Hong Hwang, Chun-Lin Chang, Nai-Han Cheng, Chin-Hsiang Lin | 2017-10-31 |
| 9799530 | Method of selectively removing silicon nitride and etching apparatus thereof | Ying-Hsueh Changchien, Yu-Ming Lee | 2017-10-24 |
| 9764364 | Apparatus and methods for movable megasonic wafer probe | Ying-Hsueh Chang Chien, Chin-Hsiang Lin, Ming-Hsi Yeh, Shao-Yen Ku | 2017-09-19 |
| 9754796 | Hard mask removal scheme | Ying-Hsueh Changchien, Yu-Ming Lee | 2017-09-05 |
| 9741585 | Reactive radical treatment for polymer removal and workpiece cleaning | Chung-Chieh Lee, Horng-Huei Tseng | 2017-08-22 |
| 9691641 | Apparatus and method of cleaning wafers | Chia-Hung Huang, Jeng-Jyi Hwang | 2017-06-27 |
| 9579697 | System and method of cleaning FOUP | Jyh-Shiou Hsu, Kuo-Sheng Chuang | 2017-02-28 |
| 9564509 | Method of fabricating an integrated circuit device | Ming-Hsi Yeh, Hsien-Hsin Lin, Ying-Hsueh Chang Chien, Yi-Fang Pai, Chin-Hsiang Lin | 2017-02-07 |
| 9536757 | Device manufacturing cleaning process using vaporized solvent | Albert Chen, Kuo-Sheng Chuang | 2017-01-03 |
| 9530617 | In-situ charging neutralization | Lin-Jung Wu, Jyh-Shiou Hsu | 2016-12-27 |
| 9449889 | Method for monitoring ion implantation | Chun-Lin Chang, Chih-Hong Hwang, Nai-Han Cheng, Chin-Hsiang Lin | 2016-09-20 |
| 9449864 | Systems and methods for fabricating and orienting semiconductor wafers | Chin-Ming Lin, Wan-Lai Chen, Chia-Hung Huang, Chin-Hsiang Lin | 2016-09-20 |
| 9435048 | Layer by layer electro chemical plating (ECP) process | Su-Horng Lin | 2016-09-06 |
| 9403254 | Methods for real-time error detection in CMP processing | James Jeng-Jyi Hwang, Bo-I Lee, Chin-Hsiang Lin | 2016-08-02 |
| 9368452 | Metal conductor chemical mechanical polish | Soon-Kang Huang, Han-Hsin Kuo, Shwang-Ming Jeng, Chin-Hsiang Lin | 2016-06-14 |
| 9349623 | Fine temperature controllable wafer heating system | Ying-Hsueh Chang Chien | 2016-05-24 |