Issued Patents All Time
Showing 126–150 of 178 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9315892 | Method and apparatus for controlling beam angle during ion implantation of a semiconductor wafer based upon pressure | Nai-Han Cheng | 2016-04-19 |
| 9299593 | Semiconductor device cleaning method and apparatus | Ming-Hsi Yeh, Kuo-Sheng Chuang, Ying-Hsueh Chang Chien, Chin-Hsiang Lin | 2016-03-29 |
| 9287133 | Hard mask removal scheme | Ying-Hsueh Changchien, Yu-Ming Lee | 2016-03-15 |
| 9242342 | Manufacture and method of making the same | Bo-I Lee, Huang Soon Kang, Chin-Hsiang Lin | 2016-01-26 |
| 9239192 | Substrate rapid thermal heating system and methods | Nai-Han Cheng | 2016-01-19 |
| 9214543 | Integration of bottom-up metal film deposition | Simon Su-Horng Lin, Chyi Shyuan Chern, Chin-Hsiang Lin | 2015-12-15 |
| 9184045 | Bottom-up PEALD process | Lin-Jung Wu, Su-Horng Lin | 2015-11-10 |
| 9165835 | Method and structure for advanced semiconductor channel substrate materials | Ming-Hsi Yeh, Chun-Yi Lee, Chin-Hsiang Lin | 2015-10-20 |
| 9138861 | CMP pad cleaning apparatus | Jiann Lih Wu, Bo-I Lee, Huang Soon Kang, Chin-Hsiang Lin | 2015-09-22 |
| 9070534 | Ion beam dimension control for ion implantation process and apparatus, and advanced process control | Chih-Hong Hwang, Chun-Lin Chang, Nai-Han Cheng, Chin-Hsiang Lin | 2015-06-30 |
| 9053907 | System and method of ion neutralization with multiple-zoned plasma flood gun | Chun-Lin Chang, Chih-Hong Hwang, Wen-Yu Ku, Chin-Hsiang Lin | 2015-06-09 |
| 9048186 | Methods for forming integrated circuits | Kuo-Bin Huang, Hsin-Chien LU, Ryan Chia-Jen Chen, Chyi Shyuan Chern, Chin-Hsiang Lin | 2015-06-02 |
| 9031684 | Multi-factor advanced process control method and system for integrated circuit fabrication | Nai-Han Cheng, Chin-Hsiang Lin, Chun-Lin Chang, Chih-Hong Hwang | 2015-05-12 |
| 9023664 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2015-05-05 |
| 9006676 | Apparatus for monitoring ion implantation | Chun-Lin Chang, Chih-Hong Hwang, Nai-Han Cheng, Chin-Hsiang Lin | 2015-04-14 |
| 8932921 | N/P metal crystal orientation for high-k metal gate Vt modulation | Su-Horng Lin, Chyi Shyuan Chern, Chin-Hsiang Lin | 2015-01-13 |
| 8926762 | Apparatus and methods for movable megasonic wafer probe | Ying-Hsueh Chang Chien, Shao-Yen Ku, Ming-Hsi Yeh, Chin-Hsiang Lin | 2015-01-06 |
| 8922122 | Ion implantation with charge and direction control | Chih-Hong Hwang, Chun-Lin Chang, Nai-Han Cheng, Chin-Hsiang Lin | 2014-12-30 |
| 8921177 | Method of fabricating an integrated circuit device | Ming-Hsi Yeh, Hsien-Hsin Lin, Ying-Hsueh Chang Chien, Yi-Fang Pai, Chin-Hsiang Lin | 2014-12-30 |
| 8871639 | Semiconductor devices and methods of manufacture thereof | Ying-Hsueh Chang Chien, Yu-Ming Lee, Man-Kit Leung | 2014-10-28 |
| 8871605 | Methods for fabricating and orienting semiconductor wafers | Chin-Ming Lin, Wan-Lai Chen, Chia-Hung Huang, Chin-Hsiang Lin | 2014-10-28 |
| 8843860 | Frame cell for shot layout flexibility | Chin-Ming Lin, Chia-Hung Huang, Chin-Hsiang Lin, Yung-Cheng Chen, Chih-Wei Lin | 2014-09-23 |
| 8766207 | Beam monitoring device, method, and system | Chih-Hong Hwang, Chun-Lin Chang, Nai-Han Cheng, Chin-Hsiang Lin | 2014-07-01 |
| 8759173 | Finlike structures and methods of making same | Ming-Hsi Yeh, Chin-Hsiang Lin | 2014-06-24 |
| 8709528 | Wafer processing method and system using multi-zone chuck | Nai-Han Cheng, You-Hua Chou, Kuo-Sheng Chuang, Chin-Hsiang Lin | 2014-04-29 |