Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269591 | Method of selectively removing silicon nitride and single wafer etching apparatus thereof | Yu-Ming Lee, Chi-Ming Yang | 2019-04-23 |
| 10011918 | Apparatus and process of electro-chemical plating | Yu-Ming Lee, Chi-Ming Yang | 2018-07-03 |
| 9799530 | Method of selectively removing silicon nitride and etching apparatus thereof | Yu-Ming Lee, Chi-Ming Yang | 2017-10-24 |
| 9754796 | Hard mask removal scheme | Yu-Ming Lee, Chi-Ming Yang | 2017-09-05 |
| 9287133 | Hard mask removal scheme | Yu-Ming Lee, Chi-Ming Yang | 2016-03-15 |