Issued Patents All Time
Showing 76–100 of 178 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763117 | Semiconductor manufacturing apparatus and method thereof | Nai-Han Cheng | 2020-09-01 |
| 10747119 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Che-Chang Hsu, Li-Jui Chen, Po-Chung Cheng | 2020-08-18 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-07-14 |
| 10687410 | Extreme ultraviolet radiation source and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-06-16 |
| 10678138 | Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiation | Wei-Chun Yen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-06-09 |
| 10668592 | Method of planarizing a wafer | Bo-I Lee, Soon-Kang Huang, Chin-Hsiang Lin | 2020-06-02 |
| 10541164 | 3D IC bump height metrology APC | Nai-Han Cheng | 2020-01-21 |
| 10527926 | Pressurized tin collection bucket with in-line draining mechanism | Hsin-Feng Chen, Li-Jui Chen | 2020-01-07 |
| 10513006 | High throughput CMP platform | Jiann Lih Wu, Jason Shen, Soon-Kang Huang, James Jeng-Jyi Hwang | 2019-12-24 |
| 10512946 | Gigasonic cleaning techniques | Ying-Hsueh Chang Chien | 2019-12-24 |
| 10509311 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Feng Yuan Hsu, Chyi Shyuan Chern, Tsiao-Chen Wu, Chun-Lin Chang | 2019-12-17 |
| 10510655 | Semiconductor devices employing a barrier layer | Ying-Hsueh Chang Chien, Yu-Ming Lee, Man-Kit Leung | 2019-12-17 |
| 10512147 | Extreme ultraviolet radiation source and droplet catcher thereof | Sheng-Ta Lin, Ssu-Yu Chen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2019-12-17 |
| 10507498 | Apparatus for particle cleaning | Ying-Hsueh Chang Chien, James Jeng-Jyi Hwang | 2019-12-17 |
| 10495987 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2019-12-03 |
| 10460999 | Metrology device and metrology method thereof | Su-Horng Lin | 2019-10-29 |
| 10269591 | Method of selectively removing silicon nitride and single wafer etching apparatus thereof | Ying-Hsueh Changchien, Yu-Ming Lee | 2019-04-23 |
| 10181415 | 3D IC bump height metrology APC | Nai-Han Cheng | 2019-01-15 |
| 10121653 | Bottom-up PEALD proces | Lin-Jung Wu, Su-Horng Lin | 2018-11-06 |
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2018-10-30 |
| 10090207 | Multi-point chemical mechanical polishing end point detection system and method of using | Jiann Lih Wu, Jeng-Jyi Hwang, Soon-Kang Huang | 2018-10-02 |
| 10065288 | Chemical mechanical polishing (CMP) platform for local profile control | Jiann Lih Wu, James Jeng-Jyi Hwang | 2018-09-04 |
| 10066127 | Composition for chemical mechanical polishing and method for reducing chemical mechanical polishing surface defects | An-Dih Yu | 2018-09-04 |
| 10035929 | pH-adjuster free chemical mechanical planarization slurry | Shu-Hao Huang, Horng-Huei Tseng, Jeng-Jyi Hwang | 2018-07-31 |
| 10020209 | Fine temperature controllable wafer heating system | Ying-Hsueh Chang Chien | 2018-07-10 |