Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11320733 | Reticle with conductive material structure | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-05-03 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2022-03-08 |
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-01-11 |
| 11219115 | EUV collector contamination prevention | Ming-Fa Wu, Chun Che Lin, Po-Chung Cheng, Huai-Tei Yang | 2022-01-04 |
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Li-Jui Chen, Po-Chung Cheng +1 more | 2021-09-14 |
| 11106146 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2021-08-31 |
| 11092555 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Bo-Tsun Liu +4 more | 2021-08-17 |
| 11062898 | Particle removal apparatus, particle removal system and particle removal method | Siao-Chian Huang, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2021-07-13 |
| 10993308 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-04-27 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-04-13 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2021-03-23 |
| 10917959 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2021-02-09 |
| 10880981 | Collector pellicle | Shang-Chieh Chien, Chi-Ming Yang, Jen-Yang Chung, Shao-Wei Luo, Chun-Kuang Chen +2 more | 2020-12-29 |
| 10842009 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-11-17 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2020-11-03 |
| 10802394 | Method for discharging static charges on reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-10-13 |
| 10718718 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Bo-Tsun Liu +4 more | 2020-07-21 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2020-07-14 |
| 10714371 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-07-14 |
| 10684561 | Lithography method | Hao-Yu Lan, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2020-06-16 |
| 10631392 | EUV collector contamination prevention | Ming-Fa Wu, Chun Che Lin, Po-Chung Cheng, Huai-Tei Yang | 2020-04-21 |
| 10524345 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Bo-Tsun Liu, Li-Jui Chen +1 more | 2019-12-31 |
| 10506698 | EUV source generation method and related system | Chun-Lin Chang, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng, Wei YI +1 more | 2019-12-10 |
| 10495987 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2019-12-03 |
| 10477663 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2019-11-12 |