Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371780 | Vacuum systems in semiconductor fabrication facilities | Wen-Lung Ho, Huai-Tei Yang | 2025-07-29 |
| 12359313 | Deposition apparatus and method of forming metal oxide layer using the same | Wen-Lung Ho, Jheng-Long Chen | 2025-07-15 |
| 12331398 | Method of forming metal oxide layer using deposition apparatus | Wen-Lung Ho, Jheng-Long Chen | 2025-06-17 |
| 11530479 | Atomic layer deposition tool and method | Chung-Ting Ko, Wen-Ju Chen, Wan-Chen Hsieh, Tai-Chun Huang, Yung-Cheng Lu +1 more | 2022-12-20 |
| 11525185 | Vacuum systems in semiconductor fabrication facilities | Wen-Lung Ho, Huai-Tei Yang | 2022-12-13 |
| 11219115 | EUV collector contamination prevention | Tzung-Chi Fu, Chun Che Lin, Po-Chung Cheng, Huai-Tei Yang | 2022-01-04 |
| 10631392 | EUV collector contamination prevention | Tzung-Chi Fu, Chun Che Lin, Po-Chung Cheng, Huai-Tei Yang | 2020-04-21 |
| 7742271 | Apparatus and surge protecting circuit thereof | Yu-Cheng Chen, Yun-Teng Shih, Han-Cheng Hsu | 2010-06-22 |