Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429314 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Bo-Tsun Liu +4 more | 2019-10-01 |
| 10429729 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2019-10-01 |
| 10361134 | Method for lithographic process and lithographic system | Wei-Chih Lai, Li-Kai Cheng, Shun-Jung Chen, Bo-Tsun Liu, Han-Lung Chang +1 more | 2019-07-23 |
| 10314154 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng +1 more | 2019-06-04 |
| 10146141 | Lithography process and system with enhanced overlay quality | Chi-Cheng Hung, Wei-Liang Lin, Yung-Sung Yen, Chun-Kuang Chen, Ru-Gun Liu +6 more | 2018-12-04 |
| 9360767 | Method and apparatus for maintaining depth of focus | Chang-Tsun Hsieh, Chih-Ming Ke, Fu-Jye Liang, Li-Jui Chen | 2016-06-07 |
| 9117830 | Semiconductor structure for extreme ultraviolet electrostatic chuck with reduced clamping effect | Chia-Hao Hsu, Chia-Chen Chen, Tzu-Wei Kao, Yu-Chao Lin | 2015-08-25 |
| 9025130 | Method and apparatus for maintaining depth of focus | Chang-Tsun Hsieh, Fu-Jye Liang, Li-Jui Chen, Chih-Ming Ke | 2015-05-05 |
| 8765582 | Method for extreme ultraviolet electrostatic chuck with reduced clamp effect | Chia-Hao Hsu, Chia-Chen Chen, Tzu-Wei Kao, Yu-Chao Lin | 2014-07-01 |
| 8520189 | Method and apparatus for maintaining depth of focus | Chang-Tsun Hsieh, Fu-Jye Liang, Li-Jiu Chen, Chih-Ming Ke | 2013-08-27 |
| 8199314 | System and method for improving immersion scanner overlay performance | Jui-Chung Peng, Chin-Hsiang Lin, Chien-Hsun Lin, Chun-Hung Lin, Yao-Wen Guo +2 more | 2012-06-12 |
| 8068208 | System and method for improving immersion scanner overlay performance | Jui-Chung Peng, Chin-Hsiang Lin, Chien-Hsun Lin, Chun-Hung Lin, Yao-Wen Guo +2 more | 2011-11-29 |
| 7800731 | Method and apparatus for removing particles in immersion lithography | Hsin Chang, Tsai-Sheng Gau | 2010-09-21 |
| 7728952 | Method and system for closing plate take-over in immersion lithography | Hsin Chang | 2010-06-01 |
| 7675604 | Hood for immersion lithography | Li-Jui Chen, Ching-Yu Chang, Fu-Jye Liang, Lin-Hung Shiu, Chun-Kuang Chen +1 more | 2010-03-09 |
| 7602471 | Apparatus and method for particle monitoring in immersion lithography | Shu-Ping Hsu, Hsiu-Yu Chang | 2009-10-13 |
| 6500242 | Apparatus and method for degassing and preventing gelation in a viscous liquid | Albert An-Ho Yin | 2002-12-31 |
| 6425497 | Method and apparatus for dispensing resist solution | Yiau-Yi Chu, Jen-Sen Huang, Shih-Hung Lu | 2002-07-30 |