Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE47272 | Methods of determining quality of a light source | Nan Chen, Kevin Hung, An-Kuo Yang | 2019-03-05 |
| RE47197 | Methods of determining quality of a light source | Nan Chen, Kevin Hung, An-Kuo Yang | 2019-01-08 |
| 9529275 | Lithography scanner throughput | Chien-Hsun Lin, An-Kao Yang, Yao-Wen Guo | 2016-12-27 |
| 8199314 | System and method for improving immersion scanner overlay performance | Tzung-Chi Fu, Chin-Hsiang Lin, Chien-Hsun Lin, Chun-Hung Lin, Yao-Wen Guo +2 more | 2012-06-12 |
| 8184896 | Methods of determining quality of a light source | Nan Chen, Kevin Hung, An-Kuo Yang | 2012-05-22 |
| 8068208 | System and method for improving immersion scanner overlay performance | Tzung-Chi Fu, Chin-Hsiang Lin, Chien-Hsun Lin, Chun-Hung Lin, Yao-Wen Guo +2 more | 2011-11-29 |
| 7795601 | Method and apparatus to improve lithography throughput | Chin-Hsiang Lin, Yung-Cheng Chen, Shy-Jay Lin | 2010-09-14 |
| 7738692 | Methods of determining quality of a light source | Nan Chen, Kevin Hung, An-Kuo Yang | 2010-06-15 |
| 7571021 | Method and system for improving critical dimension uniformity | Chun-Hung Lin, Shy-Jay Lin, Heng-Hsin Liu, Chien-Hsun Lin, Yao-Wen Guo | 2009-08-04 |