Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529275 | Lithography scanner throughput | Chien-Hsun Lin, An-Kao Yang, Jui-Chung Peng | 2016-12-27 |
| 8199314 | System and method for improving immersion scanner overlay performance | Jui-Chung Peng, Tzung-Chi Fu, Chin-Hsiang Lin, Chien-Hsun Lin, Chun-Hung Lin +2 more | 2012-06-12 |
| 8068208 | System and method for improving immersion scanner overlay performance | Jui-Chung Peng, Tzung-Chi Fu, Chin-Hsiang Lin, Chien-Hsun Lin, Chun-Hung Lin +2 more | 2011-11-29 |
| 7787977 | Methods and systems for forming semiconductor structures | Chien-Hsun Lin, An-Kuo Yang, Chun-Hung Lin | 2010-08-31 |
| 7571021 | Method and system for improving critical dimension uniformity | Chun-Hung Lin, Shy-Jay Lin, Heng-Hsin Liu, Chien-Hsun Lin, Jui-Chung Peng | 2009-08-04 |