Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11287867 | Power sequence monitoring system | Pu-Sung Lin, Tseng-Hua Tung, Yi Liu, Chang Liu | 2022-03-29 |
| 9529275 | Lithography scanner throughput | An-Kao Yang, Jui-Chung Peng, Yao-Wen Guo | 2016-12-27 |
| 9490254 | Fin sidewall removal to enlarge epitaxial source/drain volume | Ru-Shang Hsiao, Sheng-Fu Yu, Yu-Chang Liang, Kuan-Yu Chen, Li-Yi Chen | 2016-11-08 |
| 9159812 | Fin sidewall removal to enlarge epitaxial source/drain volume | Ru-Shang Hsiao, Sheng-Fu Yu, Yu-Chang Liang, Kuan-Yu Chen, Li-Yi Chen | 2015-10-13 |
| 8199314 | System and method for improving immersion scanner overlay performance | Jui-Chung Peng, Tzung-Chi Fu, Chin-Hsiang Lin, Chun-Hung Lin, Yao-Wen Guo +2 more | 2012-06-12 |
| 8068208 | System and method for improving immersion scanner overlay performance | Jui-Chung Peng, Tzung-Chi Fu, Chin-Hsiang Lin, Chun-Hung Lin, Yao-Wen Guo +2 more | 2011-11-29 |
| 7787977 | Methods and systems for forming semiconductor structures | An-Kuo Yang, Yao-Wen Guo, Chun-Hung Lin | 2010-08-31 |
| 7571021 | Method and system for improving critical dimension uniformity | Chun-Hung Lin, Shy-Jay Lin, Heng-Hsin Liu, Jui-Chung Peng, Yao-Wen Guo | 2009-08-04 |
| 6979820 | CD SEM automatic focus methodology and apparatus for constant electron beam dosage control | Chih-Ming Ke, Yao-Ching Ku | 2005-12-27 |