Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7800731 | Method and apparatus for removing particles in immersion lithography | Tzung-Chi Fu, Tsai-Sheng Gau | 2010-09-21 |
| 7728952 | Method and system for closing plate take-over in immersion lithography | Tzung-Chi Fu | 2010-06-01 |