Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101659 | Lithography method with surface modification layer | Shu-Fang Chen, Hung-Chung Chien, Hung-Chang Hsieh | 2018-10-16 |
| 7675604 | Hood for immersion lithography | Li-Jui Chen, Tzung-Chi Fu, Ching-Yu Chang, Fu-Jye Liang, Chun-Kuang Chen +1 more | 2010-03-09 |
| 7666576 | Exposure scan and step direction optimization | Fu-Jye Liang, Chun-Kuang Chen, Tsai-Sheng Gau, Burn Jeng Lin | 2010-02-23 |