Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099310 | System and method for cleaning an EUV mask | Yen-Hui Li, Tzung-Chi Fu | 2024-09-24 |
| 11681235 | System and method for cleaning an EUV mask | Yen-Hui Li, Tzung-Chi Fu | 2023-06-20 |