Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420313 | Onsite cleaning system and method | Sung-Han Tsai, Chueh-Chi Kuo, Li-Jui Chen | 2025-09-23 |
| 12210296 | Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit | Shih-Yu Tu, Shao-Hua Wang, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2024-04-09 |
| 11520246 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2022-12-06 |