Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405541 | Methods of servicing photolithographic apparatus | Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen | 2025-09-02 |
| 12388003 | Chip package structure with metal-containing layer | Kuo-Ching Hsu, Chen-Shien Chen | 2025-08-12 |
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Wei-Shin Cheng, Ming-Hsun Tsai, Hsin-Feng Chen +6 more | 2024-12-10 |
| 12125715 | Chip package structure with nickel layer | Kuo-Ching Hsu, Chen-Shien Chen | 2024-10-22 |
| 12111582 | Substrate stage and substrate processing system using the same | Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-10-08 |
| 12114411 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Chih Huang, Ming-Hsun Tsai, Shang-Chieh Chien, Heng-Hsin Liu | 2024-10-08 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu +7 more | 2024-08-20 |
| 12055864 | Droplet generator and method of servicing a photolithographic tool | Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen | 2024-08-06 |
| 12002746 | Chip package structure with metal-containing layer | Kuo-Ching Hsu, Chen-Shien Chen | 2024-06-04 |
| 11747741 | Substrate stage, substrate processing system using the same, and method for processing substrate | Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-09-05 |
| 11728180 | Chip package structure with conductive adhesive layer | Kuo-Ching Hsu, Chen-Shien Chen | 2023-08-15 |
| 11602037 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Chih Huang, Ming-Hsun Tsai, Shang-Chieh Chien, Heng-Hsin Liu | 2023-03-07 |
| 11556065 | Wafer stage and method thereof | Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-01-17 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |
| 11537053 | Semiconductor processing tool and methods of operation | Chiao-Hua Cheng, Yu-Kuang SUN, Wei-Shin Cheng, Ming-Hsun Tsai, Cheng-Hao LAI +6 more | 2022-12-27 |
| 11533799 | System and method for supplying target material in an EUV light source | Hsin-Feng Chen, Ming-Hsun Tsai, Li-Jui Chen, Shang-Chieh Chien, Heng-Hsin Liu +6 more | 2022-12-20 |
| 11528797 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Wei-Shin Cheng, Ming-Hsun Tsai, Hsin-Feng Chen +6 more | 2022-12-13 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Ming-Hsun Tsai, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen +6 more | 2022-09-13 |
| 11335634 | Chip package structure and method for forming the same | Kuo-Ching Hsu, Chen-Shien Chen | 2022-05-17 |
| 11302537 | Chip package structure with conductive adhesive layer and method for forming the same | Kuo-Ching Hsu, Chen-Shien Chen | 2022-04-12 |
| 11275317 | Droplet generator and method of servicing a photolithographic tool | Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen | 2022-03-15 |
| 9748156 | Semiconductor package assembly, semiconductor package and forming method thereof | Shu-Shen Yeh, Cheng-Lin Huang, Chin-Hua Wang, Kuang-Chun Lee, Wen-Yi Lin +4 more | 2017-08-29 |