Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111582 | Substrate stage and substrate processing system using the same | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-10-08 |
| 11747741 | Substrate stage, substrate processing system using the same, and method for processing substrate | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-09-05 |
| 11556065 | Wafer stage and method thereof | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-01-17 |