Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841625 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2023-12-12 |
| 11822259 | Acoustic particle deflection in lithography tool | Tai-Yu Chen, Sagar Deepak Khivsara, Shang-Chieh Chien, Kai Tak Lam | 2023-11-21 |
| 11747735 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-09-05 |
| 11694820 | Radiation source apparatus and method for using the same | Wei-Chung Tu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |
| 11696503 | Two-dimensional thermal electric generators | Qiliang Li, Abbas Arab | 2023-07-04 |
| 11693326 | System and method for dynamically controlling temperature of thermostatic reticles | Tzu-Jung Pan, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |
| 11650512 | Reticle cleaning device and method of use | Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-05-16 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Chieh Hsieh +5 more | 2023-05-09 |
| 11605477 | EUV lithography apparatus | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2023-03-14 |
| 11567415 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2023-01-31 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |
| 11537053 | Semiconductor processing tool and methods of operation | Chiao-Hua Cheng, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen, Ming-Hsun Tsai +6 more | 2022-12-27 |
| 11513441 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Wei-Chun Yen | 2022-11-29 |
| 11380566 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li | 2022-07-05 |
| 11243479 | Method of operating semiconductor apparatus and semiconductor apparatus | Hsiang Chen, Shang-Chieh Chien, Li-Jui Chen | 2022-02-08 |
| 11225837 | Dual-speed dual—core enhanced drilling equipment | Liexiang Han, Zuo Chen, Bin LIU, Xiaofeng YANG, Jianlin Yao +10 more | 2022-01-18 |
| 10955752 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Wei-Chun Yen | 2021-03-23 |
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Yung-Teng Yu, Chi-Ming Yang, Shang-Chieh Chien +3 more | 2020-12-29 |
| 10879093 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li | 2020-12-29 |
| 10871647 | Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source | Kuo-An Liu, Gwan Sin Chang, Bharath Kumar Pulicherla, Li-Jui Chen, Chung-Cheng Wu +1 more | 2020-12-22 |
| 10859928 | EUV light source and apparatus for lithography | Yu-Chih Chen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10627728 | Method for creating vacuum in load lock chamber | Tung-Jung Chang, Yu-Fu Lin | 2020-04-21 |
| 10593856 | Mechanical and thermal electric generators | Qiliang Li, Abbas Arab | 2020-03-17 |
| 10504760 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li | 2019-12-10 |
| 10156794 | Positioning device for aligning semiconductor tool and overhead hoist transport system | Yu-Fu Lin, Chia-Chen Chen | 2018-12-18 |