Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang +6 more | 2021-09-28 |
| 11029613 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2021-06-08 |
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Sheng-Kang Yu, Yung-Teng Yu, Chi-Ming Yang, Shang-Chieh Chien +3 more | 2020-12-29 |
| 10779387 | Extreme ultraviolet photolithography system and method | Han-Lung Chang, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen, Po-Chung Cheng | 2020-09-15 |
| 10719020 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2020-07-21 |
| 10684009 | Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber | Ping-Cheng Li, Yen-Hsun Chen | 2020-06-16 |
| 10514167 | Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber | Ping-Cheng Li, Yen-Hsun Chen | 2019-12-24 |
| 10495974 | Target feeding system | — | 2019-12-03 |
| 9360126 | Relief valve assembly with anti-frozen shielding hat | Ming Chyuan Lin, Chaoen Wang, Tz Te Yang | 2016-06-07 |
| 7598943 | Resizable wireless pointing device with a storable receiver | Chih-Wen Su | 2009-10-06 |