Issued Patents All Time
Showing 26–50 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10718718 | EUV vessel inspection method and related system | Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2020-07-21 |
| 10697084 | High resistance virtual anode for electroplating cell | Po-Wei Wang | 2020-06-30 |
| 10524345 | Residual gain monitoring and reduction for EUV drive laser | Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2019-12-31 |
| 10509311 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Feng Yuan Hsu, Chyi Shyuan Chern, Chi-Ming Yang, Tsiao-Chen Wu | 2019-12-17 |
| 10506698 | EUV source generation method and related system | Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng, Wei YI +1 more | 2019-12-10 |
| 10429729 | EUV radiation modification methods and systems | Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2019-10-01 |
| 10429314 | EUV vessel inspection method and related system | Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2019-10-01 |
| 10310380 | High-brightness light source | Tsiao-Chen Wu | 2019-06-04 |
| 10167567 | High resistance virtual anode for electroplating cell | Po-Wei Wang | 2019-01-01 |
| 10113233 | Multi-zone temperature control for semiconductor wafer | Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2018-10-30 |
| 9865429 | Ion implantation with charge and direction control | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2018-01-09 |
| 9805913 | Ion beam dimension control for ion implantation process and apparatus, and advanced process control | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2017-10-31 |
| 9449889 | Method for monitoring ion implantation | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2016-09-20 |
| 9324910 | Light emitting diode | Hsin-Hsien Wu, Chyi Shyuan Chern, Ching-Wen Hsiao, Kuang-Huan Hsu | 2016-04-26 |
| 9224636 | Methods of forming through silicon via openings | Chyi Shyuan Chern, Hsin-Hsien Wu, Hsing-Kuo Hsia, Hung-Yi Kuo | 2015-12-29 |
| 9105591 | Rotatable and tunable heaters for semiconductor furnace | Zin-Chang Wei, Hsin-Hsien Wu | 2015-08-11 |
| 9070534 | Ion beam dimension control for ion implantation process and apparatus, and advanced process control | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2015-06-30 |
| 9053907 | System and method of ion neutralization with multiple-zoned plasma flood gun | Chih-Hong Hwang, Wen-Yu Ku, Chi-Ming Yang, Chin-Hsiang Lin | 2015-06-09 |
| 9042509 | Liquid crystal display and bidirectional shift register device thereof | Chia-Hua Yu, Chien-Ting Chan, Chien-Chuan Ko | 2015-05-26 |
| 9031684 | Multi-factor advanced process control method and system for integrated circuit fabrication | Nai-Han Cheng, Chin-Hsiang Lin, Chi-Ming Yang, Chih-Hong Hwang | 2015-05-12 |
| 9023664 | Multi-zone temperature control for semiconductor wafer | Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2015-05-05 |
| 9006676 | Apparatus for monitoring ion implantation | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2015-04-14 |
| 8925479 | System and method of dosage profile control | Keung Hui, Jong-I Mou | 2015-01-06 |
| 8922122 | Ion implantation with charge and direction control | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2014-12-30 |
| 8906712 | Light emitting diode and method of fabrication thereof | Hsin-Hsien Wu, Chyi Shyuan Chern, Ching-Wen Hsiao, Kuang-Huan Hsu | 2014-12-09 |