Issued Patents All Time
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8766207 | Beam monitoring device, method, and system | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2014-07-01 |
| 8716128 | Methods of forming through silicon via openings | Chyi Shyuan Chern, Hsin-Hsien Wu, Hsing-Kuo Hsia, Hung-Yi Kuo | 2014-05-06 |
| 8664622 | System and method of ion beam source for semiconductor ion implantation | Chih-Hong Hwang, Chi-Ming Yang, Chin-Hsiang Lin, Wen-Yu Ku | 2014-03-04 |
| 8592785 | Multi-ion beam implantation apparatus and method | Nai-Han Cheng, Chin-Hsiang Lin, Chi-Ming Yang, Chih-Hong Hwang | 2013-11-26 |
| 8581204 | Apparatus for monitoring ion implantation | Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2013-11-12 |
| 8536491 | Rotatable and tunable heaters for semiconductor furnace | Zin-Chang Wei, Hsin-Hsien Wu | 2013-09-17 |
| 8404572 | Multi-zone temperature control for semiconductor wafer | Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2013-03-26 |
| 8309444 | System and method of dosage profile control | Keung Hui, Jong-I Mou | 2012-11-13 |
| 8294124 | Scanning method and system using 2-D ion implanter | Keung Hui | 2012-10-23 |
| 6644091 | Lower die for a bending machine | Fu-Shun Huang | 2003-11-11 |