Issued Patents All Time
Showing 51–75 of 264 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12078933 | System and method for omnidirectional real time detection of photolithography characteristics | Tai-Yu Chen, Shang-Chieh Chien, Sheng-Kang Yu, Heng-Hsin Liu | 2024-09-03 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu +7 more | 2024-08-20 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Ming-Hsun Tsai, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen +6 more | 2024-08-13 |
| 12061423 | Method and apparatus for mitigating tin debris | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2024-08-13 |
| 12055867 | Lithography contamination control | Chieh Hsieh, Tai-Yu Chen, Cho-Ying Lin, Heng-Hsin Liu, Shang-Chieh Chien | 2024-08-06 |
| 12055865 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Che-Chang Hsu, Chi-Ming Yang | 2024-08-06 |
| 12055864 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien | 2024-08-06 |
| 12050399 | Pellicle assembly and method of making same | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien, Tsai-Sheng Gau, Chin-Hsiang Lin | 2024-07-30 |
| 12044975 | Extreme ultraviolet control system | Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng | 2024-07-23 |
| 12032303 | EUV wafer defect improvement and method of collecting nonconductive particles | Tao Chen, Chia-Yu Lee | 2024-07-09 |
| 12028959 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Po-Chung Cheng, Hsiao-Lun Chang | 2024-07-02 |
| 12025918 | Method for lithography in semiconductor fabrication | Cheng-Kuan Wu, Po-Chung Cheng, Chih-Tsung Shih | 2024-07-02 |
| 12019378 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien +1 more | 2024-06-25 |
| 12007694 | Lithography apparatus and method | Wei-Chun Yen, Chi-Ming Yang, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2024-06-11 |
| 12009177 | Detection using semiconductor detector | Ya-Chin King, Chrong-Jung Lin, Burn Jeng Lin, Chien-Ping Wang, Shao-Hua Wang +1 more | 2024-06-11 |
| 11997778 | Replacement and refill method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Hsiao-Lun Chang, Po-Chung Cheng | 2024-05-28 |
| 11982944 | Method of lithography process and transferring a reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Po-Chung Cheng +1 more | 2024-05-14 |
| 11979971 | EUV light source and apparatus for lithography | Yen-Shuo Su, Chun-Lin Chang, Han-Lung Chang, Po-Chung Cheng | 2024-05-07 |
| 11973302 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2024-04-30 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Heng-Hsin Liu | 2024-04-09 |
| 11948702 | Radiation source apparatus and method for using the same | Wei-Chung Tu, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2024-04-02 |
| 11906902 | Semiconductor processing tool and methods of operation | Tai-Yu Chen, Shang-Chieh Chien, Sheng-Kang Yu, Heng-Hsin Liu | 2024-02-20 |
| 11860544 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Yen-Shuo Su | 2024-01-02 |
| 11852978 | EUV lithography system with 3D sensing and tunning modules | Tai-Yu Chen, Tzu-Jung Pan, Kuan-Hung Chen, Sheng-Kang Yu, Shang-Chieh Chien +1 more | 2023-12-26 |
| 11841625 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2023-12-12 |