Issued Patents All Time
Showing 26–50 of 264 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228863 | EUV light source contamination monitoring system | Cheng-Hung Tsai, Sheng-Kang Yu, Heng-Hsin Liu, Shang-Chieh Chien | 2025-02-18 |
| 12216413 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-02-04 |
| 12210296 | Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Heng-Hsin Liu | 2025-01-28 |
| 12210295 | Reticle cleaning device and method of use | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-01-28 |
| 12207381 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Ssu-Yu Chen, Shang-Chieh Chien | 2025-01-21 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2025-01-07 |
| 12189298 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-01-07 |
| 12189311 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Jhan-Hong YEH, Han-Lung Chang, Tzung-Chi Fu | 2025-01-07 |
| 12174545 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien +5 more | 2024-12-24 |
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2024-12-10 |
| 12167525 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Tzung-Chi Fu +1 more | 2024-12-10 |
| 12164235 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2024-12-10 |
| 12158701 | Particle removal device and method | Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien, Heng-Hsin Liu | 2024-12-03 |
| 12133319 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Chun-Lin Chang, Han-Lung Chang | 2024-10-29 |
| 12130556 | Plasma position control for extreme ultraviolet lithography light sources | Ssu-Yu Chen, Hsin-Feng Chen, Chi-Ming Yang | 2024-10-29 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang +1 more | 2024-10-29 |
| 12119129 | EUV lithography apparatus | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2024-10-15 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2024-10-08 |
| 12111583 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Kai-Fa Ho, Heng-Hsin Liu | 2024-10-08 |
| 12111582 | Substrate stage and substrate processing system using the same | Yu-Huan Chen, Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Heng-Hsin Liu | 2024-10-08 |
| 12096544 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang-Lin Chen, Chieh Hsieh +5 more | 2024-09-17 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12085865 | System and method for detecting debris in a photolithography system | Shih-Yu Tu, Chieh Hsieh, Shang-Chieh Chien, Heng-Hsin Liu | 2024-09-10 |
| 12085860 | System and method for monitoring and controlling extreme ultraviolet photolithography processes | Tai-Yu Chen, Heng-Hsin Liu, Shang-Chieh Chien | 2024-09-10 |
| 12085585 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2024-09-10 |