Issued Patents All Time
Showing 76–100 of 264 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832372 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Tzung-Chi Fu +1 more | 2023-11-28 |
| 11830754 | Semiconductor processing method and apparatus | Shang-Shiuan Deng, Fan-Chi LIN, Chueh-Chi Kuo, Heng-Hsin Liu | 2023-11-28 |
| 11829082 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Po-Chung Cheng | 2023-11-28 |
| 11822256 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Kai-Fa Ho, Heng-Hsin Liu | 2023-11-21 |
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2023-11-07 |
| 11809075 | EUV lithography mask with a porous reflective multilayer structure | Chih-Tsung Shih, Shih-Chang Shih, Po-Chung Cheng | 2023-11-07 |
| 11809087 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Kai-Fa Ho, Heng-Hsin Liu | 2023-11-07 |
| 11803129 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2023-10-31 |
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2023-10-24 |
| 11792909 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2023-10-17 |
| 11782350 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun +3 more | 2023-10-10 |
| 11768437 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien +5 more | 2023-09-26 |
| 11747741 | Substrate stage, substrate processing system using the same, and method for processing substrate | Yu-Huan Chen, Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Heng-Hsin Liu | 2023-09-05 |
| 11747735 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2023-09-05 |
| 11737200 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +1 more | 2023-08-22 |
| 11723141 | EUV radiation generation methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Po-Chung Cheng | 2023-08-08 |
| 11703769 | Light source, EUV lithography system, and method for performing circuit layout patterning process | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2023-07-18 |
| 11703763 | Method of lithography process using reticle container with discharging device | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Po-Chung Cheng +1 more | 2023-07-18 |
| 11698591 | System and method of discharging an EUV mask | Yi-Zhen Chen, Yen-Hsun Chen, Jhan-Hong YEH, Tzung-Chi Fu, Han-Lung Chang | 2023-07-11 |
| 11694820 | Radiation source apparatus and method for using the same | Wei-Chung Tu, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2023-07-04 |
| 11693326 | System and method for dynamically controlling temperature of thermostatic reticles | Tzu-Jung Pan, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2023-07-04 |
| 11693324 | System and method for detecting debris in a photolithography system | Shih-Yu Tu, Chieh Hsieh, Shang-Chieh Chien, Heng-Hsin Liu | 2023-07-04 |
| 11687011 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Jhan-Hong YEH, Han-Lung Chang, Tzung-Chi Fu | 2023-06-27 |
| 11681234 | Mask for attracting charged particles and method for using the same | Yen-An Chen, Heng-Hsin Liu, Tzung-Chi Fu, Han-Lung Chang | 2023-06-20 |
| 11680958 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2023-06-20 |