Issued Patents All Time
Showing 126–150 of 264 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520246 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Heng-Hsin Liu | 2022-12-06 |
| 11513441 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Shang-Chieh Chien, Sheng-Kang Yu, Wei-Chun Yen | 2022-11-29 |
| 11506986 | Thermal controlling method in lithography system | Chi-Ming Yang, Yen-Shuo Su, Jui-Pin Wu | 2022-11-22 |
| 11483918 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2022-10-25 |
| 11470710 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Po-Chung Cheng, Hsiao-Lun Chang | 2022-10-11 |
| 11467498 | Extreme ultraviolet control system | Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng | 2022-10-11 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG +3 more | 2022-09-20 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Ming-Hsun Tsai, Yu-Huan Chen, Wei-Shin Cheng, Cheng-Hao LAI +6 more | 2022-09-13 |
| 11437161 | Lithography apparatus and method for using the same | Chun-Lin Chang, Chieh Hsieh, Shang-Chieh Chien, Han-Lung Chang, Heng-Hsin Liu +1 more | 2022-09-06 |
| 11419203 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Po-Chung Cheng | 2022-08-16 |
| 11392040 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien +5 more | 2022-07-19 |
| 11392041 | Particle removal device and method | Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien, Heng-Hsin Liu | 2022-07-19 |
| 11360392 | Photolithography device having illuminator and method for adjusting intensity uniformity | Che-Chang Hsu, Chieh-Jen Cheng, Shang-Chieh Chien, Chao-Chen Chang, Ssu-Yu Chen | 2022-06-14 |
| 11340531 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Yen-Shuo Su | 2022-05-24 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2022-05-17 |
| 11320744 | Method and apparatus for controlling extreme ultraviolet light | Ssu-Yu Chen, Shang-Chieh Chien | 2022-05-03 |
| 11320733 | Reticle with conductive material structure | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Po-Chung Cheng +1 more | 2022-05-03 |
| 11297710 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Ssu-Yu Chen, Shang-Chieh Chien | 2022-04-05 |
| 11287755 | Lithography system and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien | 2022-03-29 |
| 11275318 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Po-Chung Cheng | 2022-03-15 |
| 11275317 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien | 2022-03-15 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Tzung-Chi Fu +1 more | 2022-03-08 |
| 11269257 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2022-03-08 |
| 11243479 | Method of operating semiconductor apparatus and semiconductor apparatus | Hsiang Chen, Sheng-Kang Yu, Shang-Chieh Chien | 2022-02-08 |
| 11237482 | Process system and operating method thereof | Chao-Chen Chang, Shao-Wei Luo, Jen-Yang Chung, Shang-Chieh Chien, Po-Chung Cheng | 2022-02-01 |