Issued Patents All Time
Showing 176–200 of 264 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10997706 | Reticle backside inspection method | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Shih-Chang Shih | 2021-05-04 |
| 10990026 | Lithography apparatus and cleaning method thereof | Chi-Ming Yang, Sheng-Ta Lin, Shang-Chieh Chien, Po-Chung Cheng | 2021-04-27 |
| 10993308 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2021-04-27 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +1 more | 2021-04-13 |
| 10969690 | Extreme ultraviolet control system for adjusting droplet illumination parameters | Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng | 2021-04-06 |
| 10962881 | Method and apparatus for lithography in semiconductor fabrication | Cheng-Kuan Wu, Po-Chung Cheng, Chih-Tsung Shih | 2021-03-30 |
| 10955750 | Lithography system and method thereof | Wei-Chun Yen, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2021-03-23 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2021-03-23 |
| 10955752 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Shang-Chieh Chien, Sheng-Kang Yu, Wei-Chun Yen | 2021-03-23 |
| 10942459 | Lithography system and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien | 2021-03-09 |
| 10928741 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Po-Chung Cheng | 2021-02-23 |
| 10925142 | EUV radiation source for lithography exposure process | Chun-Chia Hsu, Kuan-Hung Chen, Shang-Chieh Chien, Po-Chung Cheng | 2021-02-16 |
| 10917959 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Po-Chung Cheng | 2021-02-09 |
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Chi-Ming Yang +3 more | 2020-12-29 |
| 10877366 | Pressurized tin collection bucket with in-line draining mechanism | Chi-Ming Yang, Hsin-Feng Chen | 2020-12-29 |
| 10877378 | Vessel for extreme ultraviolet radiation source | Ssu-Yu Chen, Che-Chang Hsu, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2020-12-29 |
| 10880981 | Collector pellicle | Shang-Chieh Chien, Chi-Ming Yang, Jen-Yang Chung, Shao-Wei Luo, Tzung-Chi Fu +2 more | 2020-12-29 |
| 10880980 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Po-Chung Cheng, Hsiao-Lun Chang | 2020-12-29 |
| 10877190 | Extreme ultraviolet radiation source | Chi-Ming Yang, Sheng-Ta Lin, Jen-Yang Chung, Shang-Chieh Chien, Po-Chung Cheng | 2020-12-29 |
| 10871719 | EUV metal droplet catchers | Sheng-Ta Lin, Po-Chung Cheng, Shang-Chieh Chien | 2020-12-22 |
| 10871713 | Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Po-Chung Cheng +1 more | 2020-12-22 |
| 10871647 | Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source | Kuo-An Liu, Gwan Sin Chang, Bharath Kumar Pulicherla, Sheng-Kang Yu, Chung-Cheng Wu +1 more | 2020-12-22 |
| 10859918 | Semiconductor apparatus and method of operating the same | Kuan-Hung Chen, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng | 2020-12-08 |
| 10859928 | EUV light source and apparatus for lithography | Yu-Chih Chen, Sheng-Kang Yu, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2020-12-08 |
| 10852649 | Methods and apparatus for removing contamination from lithographic tool | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Shih-Chang Shih | 2020-12-01 |