Issued Patents All Time
Showing 201–225 of 264 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852191 | Light source system and polarization angle adjusting method | Jen-Hao Yeh, Chun-Lin Chang, Han-Lung Chang, Po-Chung Cheng | 2020-12-01 |
| 10842009 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2020-11-17 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2020-11-03 |
| 10802405 | Radiation source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng | 2020-10-13 |
| 10802394 | Method for discharging static charges on reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Po-Chung Cheng +1 more | 2020-10-13 |
| 10802406 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Liu Bo-Tsun +1 more | 2020-10-13 |
| 10795264 | Light source for lithography exposure process | Hsin-Feng Chen, Han-Lung Chang, Bo-Tsun Liu | 2020-10-06 |
| 10791616 | Radiation source apparatus | Ssu-Yu Chen, Chi-Ming Yang, Che-Chang Hsu, Shang-Chieh Chien, Po-Chung Cheng | 2020-09-29 |
| 10779387 | Extreme ultraviolet photolithography system and method | Ming-Hsun Tsai, Han-Lung Chang, Yen-Hsun Chen, Shao-Hua Wang, Po-Chung Cheng | 2020-09-15 |
| 10747119 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Chi-Ming Yang, Che-Chang Hsu, Po-Chung Cheng | 2020-08-18 |
| 10725384 | Communication control method | Chao-Chen Chang, Shao-Wei Luo, Shang-Chieh Chien, Po-Chung Cheng | 2020-07-28 |
| 10719020 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Han-Lung Chang, Chia-Chen Chen | 2020-07-21 |
| 10718718 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2020-07-21 |
| 10720419 | Layout modification method for exposure manufacturing process | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Po-Chung Cheng +1 more | 2020-07-21 |
| 10712651 | Method and apparatus for collecting information used in image-error compensation | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Po-Chung Cheng +1 more | 2020-07-14 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2020-07-14 |
| 10714371 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Po-Chung Cheng +1 more | 2020-07-14 |
| 10687410 | Extreme ultraviolet radiation source and cleaning method thereof | Chi-Ming Yang, Sheng-Ta Lin, Shang-Chieh Chien, Po-Chung Cheng | 2020-06-16 |
| 10678138 | Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiation | Wei-Chun Yen, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2020-06-09 |
| 10678148 | Lithography system and lithography method | Kai-Chieh Chang, Tsung-Hsun Lee, Ching-Juinn Huang, Po-Chung Cheng | 2020-06-09 |
| 10670970 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang +1 more | 2020-06-02 |
| 10656539 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Po-Chung Cheng | 2020-05-19 |
| 10642158 | Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Po-Chung Cheng +1 more | 2020-05-05 |
| 10624196 | Laser source device and extreme ultraviolet lithography device | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Cheng-Chieh Chen +2 more | 2020-04-14 |
| 10534279 | Methods and apparatus for removing contamination from lithographic tool | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Shih-Chang Shih | 2020-01-14 |