Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11657492 | Reticle backside inspection method | Po-Chung Cheng, Chih-Tsung Shih, Li-Jui Chen, Shih-Chang Shih | 2023-05-23 |
| 10997706 | Reticle backside inspection method | Po-Chung Cheng, Chih-Tsung Shih, Li-Jui Chen, Shih-Chang Shih | 2021-05-04 |
| 10852649 | Methods and apparatus for removing contamination from lithographic tool | Po-Chung Cheng, Chih-Tsung Shih, Li-Jui Chen, Shih-Chang Shih | 2020-12-01 |
| 10534279 | Methods and apparatus for removing contamination from lithographic tool | Po-Chung Cheng, Chih-Tsung Shih, Li-Jui Chen, Shih-Chang Shih | 2020-01-14 |
| 10509334 | Methods and apparatus for removing contamination from lithographic tool | Po-Chung Cheng, Chih-Tsung Shih, Li-Jui Chen, Shih-Chang Shih | 2019-12-17 |