Issued Patents All Time
Showing 226–250 of 264 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527926 | Pressurized tin collection bucket with in-line draining mechanism | Chi-Ming Yang, Hsin-Feng Chen | 2020-01-07 |
| 10524345 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +1 more | 2019-12-31 |
| 10512147 | Extreme ultraviolet radiation source and droplet catcher thereof | Chi-Ming Yang, Sheng-Ta Lin, Ssu-Yu Chen, Shang-Chieh Chien, Po-Chung Cheng | 2019-12-17 |
| 10509334 | Methods and apparatus for removing contamination from lithographic tool | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Shih-Chang Shih | 2019-12-17 |
| 10509324 | Light source for lithography exposure process | Hsin-Feng Chen, Han-Lung Chang, Bo-Tsun Liu | 2019-12-17 |
| 10506698 | EUV source generation method and related system | Chun-Lin Chang, Tzung-Chi Fu, Bo-Tsun Liu, Po-Chung Cheng, Wei YI +1 more | 2019-12-10 |
| 10495987 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2019-12-03 |
| 10477663 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2019-11-12 |
| 10429314 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2019-10-01 |
| 10429729 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Po-Chung Cheng | 2019-10-01 |
| 10373906 | Structure and formation method of interconnection structure of semiconductor device | Jyh-Nan Lin, Tsung-Dar Lee | 2019-08-06 |
| 10366973 | Layout modification method for exposure manufacturing process | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Po-Chung Cheng +1 more | 2019-07-30 |
| 10361134 | Method for lithographic process and lithographic system | Wei-Chih Lai, Li-Kai Cheng, Shun-Jung Chen, Bo-Tsun Liu, Han-Lung Chang +1 more | 2019-07-23 |
| 10342109 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Bo-Tsun Liu, Po-Chung Cheng | 2019-07-02 |
| 10338475 | Light source for lithography exposure process | Hsin-Feng Chen, Han-Lung Chang, Bo-Tsun Liu | 2019-07-02 |
| 10331035 | Light source for lithography exposure process | Cheng-Hao LAI, Han-Lung Chang | 2019-06-25 |
| 10314154 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2019-06-04 |
| 10274844 | Lithography apparatus and method for protecting a reticle | Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng | 2019-04-30 |
| 10165664 | Apparatus for decontaminating windows of an EUV source module | Hsin-Feng Chen, Bo-Tsun Liu, Han-Lung Chang | 2018-12-25 |
| 10162277 | Extreme ultraviolet lithography system with debris trapper on exhaust line | Shang-Chieh Chien, Jye-Fu Jeng, Shih-Chang Shih, Kun-Jin Wu, Guan-Heng Liu +2 more | 2018-12-25 |
| 10146141 | Lithography process and system with enhanced overlay quality | Chi-Cheng Hung, Wei-Liang Lin, Yung-Sung Yen, Chun-Kuang Chen, Ru-Gun Liu +6 more | 2018-12-04 |
| 10048604 | System and method for lithography with leveling sensor | — | 2018-08-14 |
| 9575415 | Wafer stage temperature control | Rui-Cheng Wu | 2017-02-21 |
| 9389520 | System and method for lithography with leveling sensor | — | 2016-07-12 |
| 9360778 | System and method for lithography patterning | Fu-Jye Liang, Hsueh-Hung Wu | 2016-06-07 |