Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162277 | Extreme ultraviolet lithography system with debris trapper on exhaust line | Shang-Chieh Chien, Jye-Fu Jeng, Shih-Chang Shih, Kun-Jin Wu, Jen-Yang Chung +2 more | 2018-12-25 |
| 7169469 | Particle-removing wafer | Tain Show Lin | 2007-01-30 |