Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054058 | Actively cooled vacuum isolation valve | Gordon Hill, David F. Broyer, Bradly Raymond Lefevre | 2021-07-06 |
| 9206919 | Corrosion and deposition protected valve apparatus and method | Bradly Raymond Lefevre, Kevin Grout, Youfan Gu | 2015-12-08 |
| 9200711 | Method of two-stage flow control | Youfan Gu, Kevin Grout | 2015-12-01 |
| 8679287 | Method and apparatus for preventing ALD reactants from damaging vacuum pumps | Youfan Gu | 2014-03-25 |
| 8671987 | Two-stage, slow-start valve apparatus | Youfan Gu, Kevin Grout | 2014-03-18 |
| 8196893 | Isolation valve with corrosion protected and heat transfer enhanced valve actuator and closure apparatus and method | Kevin Grout, Jeffrey D. Kiernan, Matthew C. Grout | 2012-06-12 |
| 6895178 | Vapor delivery system | Youfan Gu, Paul Dozoretz, Benjamin Goss, James Mueller, Donald W. Higgins | 2005-05-17 |