Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191623 | Light emitting sealed body and light source device | Akio Suzuki, Toru Fujita, Akinori Asai, Yusei Nagata, Shinichi Ohba +4 more | 2025-01-07 |
| 12165856 | Inductively coupled plasma light source | Kosuke Saito, Wolfram Neff, Robert M. Grzybinski, Michael J. Roderick | 2024-12-10 |
| 12156322 | Inductively coupled plasma light source with switched power supply | Frederick Marvin Niell, III, Donald K. Smith, Matthew Besen, David B. Reisman, Daniel J. Arcaro +1 more | 2024-11-26 |
| 11972931 | Light emitting sealed body, light emitting unit, and light source device | Akio Suzuki, Toru Fujita, Akinori Asai, Yusei Nagata, Shinichi Ohba +3 more | 2024-04-30 |
| 11862922 | Light emitting sealed body and light source device | Akio Suzuki, Toru Fujita, Akinori Asai, Yusei Nagata, Shinichi Ohba +4 more | 2024-01-02 |
| 11367989 | Light emitting unit and light source device | Akio Suzuki, Toru Fujita, Akinori Asai, Yusei Nagata, Shinichi Ohba +3 more | 2022-06-21 |
| 8173986 | Laser-heated infrared source | William M. Holber, Donald K. Smith, Matthew Besen, Paul A. Blackborow | 2012-05-08 |
| 8143790 | Method for inductively-driven plasma light source | Donald K. Smith, Matthew Besen, Paul A. Blackborow | 2012-03-27 |
| 8019043 | High-resolution X-ray optic and method for constructing an X-ray optic | Michael J. Roderick | 2011-09-13 |
| 7948185 | Inductively-driven plasma light source | Donald K. Smith, Matthew Besen, Paul A. Blackborow, Ron Collins | 2011-05-24 |
| 7307375 | Inductively-driven plasma light source | Donald K. Smith, Matthew Besen, Paul A. Blackborow | 2007-12-11 |
| 7238266 | Method and apparatus for fluorine generation and recirculation | Donald K. Smith, Matthew Besen, William M. Holber | 2007-07-03 |
| 7199384 | Inductively-driven light source for lithography | Donald K. Smith, Matthew Besen, Paul A. Blackborow | 2007-04-03 |
| 7183717 | Inductively-driven light source for microscopy | Donald K. Smith, Matthew Besen, Paul A. Blackborow | 2007-02-27 |
| 6887339 | RF power supply with integrated matching network | Daniel Goodman, Andrzej Bortkiewicz, Gary D. Alley, William M. Holber | 2005-05-03 |
| 6781119 | Ion storage system | Donald K. Smith, Matthew Besen | 2004-08-24 |
| 6687635 | Apparatus and method for compensated sensor output | Philip J. Maiorana, Santhi E. Mathew, Leonid Mindlin, Claudia J. Quigley, Eric R. Taranto +1 more | 2004-02-03 |