Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887339 | RF power supply with integrated matching network | Daniel Goodman, Andrzej Bortkiewicz, Gary D. Alley, Stephen F. Horne | 2005-05-03 |
| 6872909 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Xing Chen, Andrew Cowe, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2005-03-29 |
| 6815633 | Inductively-coupled toroidal plasma source | Xing Chen, Andrew Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz | 2004-11-09 |
| 6664497 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2003-12-16 |
| 6559408 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2003-05-06 |
| 6552296 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2003-04-22 |
| 6486431 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2002-11-26 |
| 6388226 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2002-05-14 |
| 6150628 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2000-11-21 |
| 5688382 | Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate | Matthew Besen, Lawrence P. Bourget, Donald K. Smith, Richard S. Post | 1997-11-18 |
| 5625259 | Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube | Donald K. Smith, Matthew Besen, Matthew P. Fitzner, Eric Georgelis | 1997-04-29 |
| 5568015 | Fluid-cooled dielectric window for a plasma system | Donald K. Smith, Matthew Besen, Matthew P. Fitzner, Eric Georgelis | 1996-10-22 |
| 5505816 | Etching of silicon dioxide selectively to silicon nitride and polysilicon | Michael Barnes, John H. Keller, Tina J. Cotler, Jonathan D. Chapple-Sokol, Dragan Podlesnik | 1996-04-09 |
| 5302266 | Method and apparatus for filing high aspect patterns with metal | Henry Grabarz, Alfred Grill, Joseph S. Logan, James T. Yeh | 1994-04-12 |
| 5263776 | Multi-wavelength optical thermometry | David W. Abraham, Joseph S. Logan, Hemantha K. Wickramasinghe | 1993-11-23 |
| 5208512 | Scanned electron cyclotron resonance plasma source | John C. Forster, Joseph S. Logan | 1993-05-04 |
| 4272699 | Electron impact ion source with field emission cathode | Manfred Faubel, Jan P. Toennies | 1981-06-09 |