Issued Patents All Time
Showing 25 most recent of 198 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183702 | Electronic package with varying interconnects | Kamal K. Sikka, Charles L. Arvin, Thomas E. Lombardi, Piyas Bal Chowdhury, Steven L. Wright | 2024-12-31 |
| 11186911 | Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same | Son V. Nguyen, Deepika Priyadarshini | 2021-11-30 |
| 11177167 | Ultrathin multilayer metal alloy liner for nano Cu interconnects | Daniel C. Edelstein, Seth L. Knupp, Son V. Nguyen, Takeshi Nogami, Vamsi K. Paruchuri +2 more | 2021-11-16 |
| 11066748 | Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same | Son V. Nguyen, Deepika Priyadarshini | 2021-07-20 |
| 10978342 | Interconnect with self-forming wrap-all-around barrier layer | Huai Huang, Takeshi Nogami, Benjamin D. Briggs, Nicholas Anthony Lanzillo, Christian Lavoie +3 more | 2021-04-13 |
| 10727114 | Interconnect structure including airgaps and substractively etched metal lines | Robert L. Bruce, Eric A. Joseph, Teddie Peregrino Magbitang, Hiroyuki Miyazoe, Deborah A. Neumayer | 2020-07-28 |
| 10643890 | Ultrathin multilayer metal alloy liner for nano Cu interconnects | Daniel C. Edelstein, Seth L. Knupp, Son V. Nguyen, Takeshi Nogami, Vamsi K. Paruchuri +2 more | 2020-05-05 |
| 10428428 | Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same | Son V. Nguyen, Deepika Priyadarshini | 2019-10-01 |
| 9947622 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Donald F. Canaperi, Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2018-04-17 |
| 9768288 | Carbon nanostructure device fabrication utilizing protect layers | Jack O. Chu, Christos D. Dimitrakopoulos, Timothy J. McArdle, Dirk Pfeiffer, Katherine L. Saenger +1 more | 2017-09-19 |
| 9698043 | Shallow trench isolation for semiconductor devices | Kevin K. Chan, Stephan A. Cohen, Deborah A. Neumayer | 2017-07-04 |
| 9691705 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Donald F. Canaperi, Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2017-06-27 |
| 9607825 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-03-28 |
| 9590054 | Low temperature spacer for advanced semiconductor devices | Kevin K. Chan, Deborah A. Neumayer, Dae-Gyu Park, Norma E. Sosa, Min Yang | 2017-03-07 |
| 9558935 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-31 |
| 9558934 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-31 |
| 9536733 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-03 |
| 9502288 | Method of forming an interconnect structure | Son V. Nguyen, Thomas J. Haigh, Jr., Hosadurga Shobha, Tuan A. Vo | 2016-11-22 |
| 9484403 | Boron rich nitride cap for total ionizing dose mitigation in SOI devices | Deborah A. Neumayer, Kenneth P. Rodbell | 2016-11-01 |
| 9472503 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Donald F. Canaperi, Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2016-10-18 |
| 9472450 | Graphene cap for copper interconnect structures | Griselda Bonilla, Christos D. Dimitrakopoulos, James B. Hannon, Qinghuang Lin, Deborah A. Neumayer +3 more | 2016-10-18 |
| 9449812 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2016-09-20 |
| 9435031 | Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same | Son V. Nguyen, Deepika Priyadarshini | 2016-09-06 |
| 9431520 | Graphene nanoribbons and carbon nanotubes fabricated from SiC fins or nanowire templates | Guy M. Cohen, Christos D. Dimitrakopoulos | 2016-08-30 |
| 9397195 | Graphene nanoribbons and carbon nanotubes fabricated from SiC fins or nanowire templates | Guy M. Cohen, Christos D. Dimitrakopoulos | 2016-07-19 |