Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495434 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2022-11-08 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2021-06-15 |
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2019-12-31 |