Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337030 | Method to grow in-situ crystalline IGZO using co-sputtering targets | Seon-Mee Cho, Stuart Brinkley, Anh Duong, Majid Gharghi, Sang Lee +2 more | 2016-05-10 |
| 9297775 | Combinatorial screening of metallic diffusion barriers | Edwin Adhiprakasha, Sean Barstow, Ashish Bodke, Zhendong Hong, Usha Raghuram +3 more | 2016-03-29 |
| 9023438 | Methods and apparatus for combinatorial PECVD or PEALD | ShouQian Shao, Chi-I Lang | 2015-05-05 |
| 8945414 | Oxide removal by remote plasma treatment with fluorine and oxygen radicals | Ashish Bodke, Abhijit Pethe, J Watanabe | 2015-02-03 |
| 8854067 | Circular transmission line methods compatible with combinatorial processing of semiconductors | Amol Joshi, Charlene Chen, John Foster, Zhendong Hong, Olov Karlsson +5 more | 2014-10-07 |
| 6383915 | Tailoring of a wetting/barrier layer to reduce electromigration in an aluminum interconnect | Gongda Yao, Zhang Xu, Fusen Chen | 2002-05-07 |
| 6313042 | Cleaning contact with successive fluorine and hydrogen plasmas | Barney M. Cohen, Kenny King-Tai Ngan, Jr-Jyan Chen | 2001-11-06 |
| 6149784 | Sputtering chamber shield promoting reliable plasma ignition | Nelson Yee, John C. Forster, Kenny King-Tai Ngan, Lisa Yang | 2000-11-21 |
| 6110836 | Reactive plasma etch cleaning of high aspect ratio openings | Barney M. Cohen, Kenny King-Tai Ngan | 2000-08-29 |