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Combinatorial screening of metallic diffusion barriers |
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Methods and apparatus for combinatorial PECVD or PEALD |
ShouQian Shao, Chi-I Lang |
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Oxide removal by remote plasma treatment with fluorine and oxygen radicals |
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Circular transmission line methods compatible with combinatorial processing of semiconductors |
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Tailoring of a wetting/barrier layer to reduce electromigration in an aluminum interconnect |
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2002-05-07 |
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Cleaning contact with successive fluorine and hydrogen plasmas |
Barney M. Cohen, Kenny King-Tai Ngan, Jr-Jyan Chen |
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| 6149784 |
Sputtering chamber shield promoting reliable plasma ignition |
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Reactive plasma etch cleaning of high aspect ratio openings |
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