Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9312137 | Reduction of native oxides by annealing in reducing gas or plasma | Frank Greer, Amol Joshi, Kevin Kashefi, Albert S. Lee, Abhijit Pethe | 2016-04-12 |
| 8945414 | Oxide removal by remote plasma treatment with fluorine and oxygen radicals | Jingang Su, Ashish Bodke, Abhijit Pethe | 2015-02-03 |