Issued Patents All Time
Showing 26–50 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9200368 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2015-12-01 |
| 9187827 | Substrate support with ceramic insulation | Gaku Furuta, John M. White, Shinichi Kurita, Soo Young Choi, Suhail Anwar | 2015-11-17 |
| 9068262 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, John M. White, Suhail Anwar, Gaku Furuta | 2015-06-30 |
| 8992723 | RF bus and RF return bus for plasma chamber electrode | Carl A. Sorensen, Jozef Kudela, Suhail Anwar, John M. White | 2015-03-31 |
| D717113 | Susceptor with heater | Gaku Furuta, John M. White, Suhail Anwar, Soo Young Choi | 2014-11-11 |
| D716098 | Susceptor with heater | Gaku Furuta, John M. White, Suhail Anwar, Soo Young Choi, Shinichi Kurita | 2014-10-28 |
| 8853098 | Substrate support with gas introduction openings | Sam Kim, John M. White, Soo Young Choi, Carl A. Sorensen, Beom Soo Park | 2014-10-07 |
| D713200 | Susceptor with heater | Gaku Furuta, John M. White, Suhail Anwar, Soo Young Choi | 2014-09-16 |
| 8733279 | PECVD process chamber backing plate reinforcement | John M. White, Shinichi Kurita | 2014-05-27 |
| 8721791 | Showerhead support structure for improved gas flow | Soo Young Choi, Qunhua Wang, Jrjyan Jerry CHEN | 2014-05-13 |
| D701329 | Substrate support | Shinichi Kurita | 2014-03-18 |
| D685335 | Substrate support | — | 2013-07-02 |
| D680946 | Gas flow diffuser faceplate | Suhail Anwar, John M. White, Soo Young Choi, Gaku Furuta, Shinichi Kurita +1 more | 2013-04-30 |
| 8430961 | Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber | Beom Soo Park, Young Jin Choi, Sam Kim, Soo Young Choi, John M. White +1 more | 2013-04-30 |
| 8381677 | Prevention of film deposition on PECVD process chamber wall | Beom Soo Park, Soo Young Choi, John M. White | 2013-02-26 |
| 8365682 | Methods and apparatus for supporting substrates | Wendell T. Blonigan, Carl A. Sorensen, John M. White | 2013-02-05 |
| D675172 | Substrate support | — | 2013-01-29 |
| D669032 | Flow blocking shadow frame support | Suhail Anwar, John M. White, Soo Young Choi, Gaku Furuta, Shinichi Kurita +1 more | 2012-10-16 |
| 8281739 | RF shutter | Gaku Furuta, Yukinobu Adachi | 2012-10-09 |
| D664249 | Flow blocker plate | Qunhua Wang | 2012-07-24 |
| 8147614 | Multi-gas flow diffuser | John M. White, Carl A. Sorensen, Beom Soo Park, Soo Young Choi | 2012-04-03 |
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2011-12-27 |
| D650818 | Inner lift pin | — | 2011-12-20 |
| 8074599 | Plasma uniformity control by gas diffuser curvature | Soo Young Choi, Beom Soo Park, John M. White | 2011-12-13 |
| 8075690 | Diffuser gravity support | Ernst Keller, John M. White, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more | 2011-12-13 |