Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D640715 | Lift pin assembly | — | 2011-06-28 |
| D635597 | Lift pin | — | 2011-04-05 |
| D627625 | Shadow frame support | Suhail Anwar, John M. White, Jeffrey A. Kho | 2010-11-23 |
| D608742 | Shadow frame | — | 2010-01-26 |
| D608743 | Shadow frame | — | 2010-01-26 |
| 7534301 | RF grounding of cathode in process chamber | John M. White, Beom Soo Park, Wendell T. Blonigan | 2009-05-19 |
| 7429410 | Diffuser gravity support | Ernst Keller, John M. White, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more | 2008-09-30 |
| 6746198 | Substrate transfer shuttle | John M. White, Norman L. Turner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan +1 more | 2004-06-08 |
| 6554907 | Susceptor with internal support | Emanuel Beer | 2003-04-29 |
| 6517303 | Substrate transfer shuttle | John M. White, Norman L. Turner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan +1 more | 2003-02-11 |
| 6213704 | Method and apparatus for substrate transfer and processing | John M. White, Wendell T. Blonigan, Shinichi Kurita | 2001-04-10 |
