Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10123379 | Substrate support with quadrants | Robin L. Tiner, Soo Young Choi, Beom Soo Park, Shinichi Kurita, Gaku Furuta | 2018-11-06 |
| 9677177 | Substrate support with quadrants | Robin L. Tiner, Soo Young Choi, Beom Soo Park, Shinichi Kurita, Gaku Furuta | 2017-06-13 |