Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142466 | Automated transfer of edge ring requiring rotational alignment | Damon Tyrone Genetti, Roy Scott Powell, Hui Han | 2024-11-12 |
| 6607640 | Temperature control of a substrate | Arvind Sundarrajan, Tse-Yong Yao, Peijun Ding | 2003-08-19 |
| 6458251 | Pressure modulation method to obtain improved step coverage of seed layer | Arvind Sundarrajan, Peijun Ding, Barry Chin, Imran Hasim | 2002-10-01 |
| 6235163 | Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance | Arvind Sundarrajan, Peijun Ding, James Tsung, Ilyoung Richard Hong, Barry Chin | 2001-05-22 |