Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142464 | In situ real-time sensing and compensation of non-uniformities in substrate processing systems | Changyou Jing, Oleksandr MIKHNENKO, Slobodan Mitrovic | 2024-11-12 |
| 10690414 | Multi-plane heater for semiconductor substrate support | Keith Gaff, Eric A. Pape | 2020-06-23 |
| 10381248 | Auto-correction of electrostatic chuck temperature non-uniformity | Eric A. Pape, Keith Gaff | 2019-08-13 |
| 10224187 | Detecting partial unclamping of a substrate from an ESC of a substrate processing system | Dmitry Opaits, Jorge Luque | 2019-03-05 |