Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791189 | Reflectometer to monitor substrate movement | Eric A. Pape, Jorge Luque, Jeffrey D. Bonde, Siyuan Tian | 2023-10-17 |
| 10312121 | Systems and methods for aligning measurement device in substrate processing systems | Marcus Musselman, Andrew D. Bailey, III | 2019-06-04 |
| 10224187 | Detecting partial unclamping of a substrate from an ESC of a substrate processing system | Benny Wu, Jorge Luque | 2019-03-05 |
| 10132290 | Apparatus and method for aerodynamic performance enhancement of a wind turbine | Seyed Gholamali Saddoughi, Grover Andrew Bennett, Matthew Patrick Boespflug, Stephen Bertram Johnson, Peggy Lynn Baehmann +4 more | 2018-11-20 |
| 9752981 | Apparatus with a spectral reflectometer for processing substrates | Seonkyung Lee | 2017-09-05 |