Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142464 | In situ real-time sensing and compensation of non-uniformities in substrate processing systems | Changyou Jing, Benny Wu, Slobodan Mitrovic | 2024-11-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142464 | In situ real-time sensing and compensation of non-uniformities in substrate processing systems | Changyou Jing, Benny Wu, Slobodan Mitrovic | 2024-11-12 |