Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9123758 | Gas injection apparatus and substrate process chamber incorporating same | Agus Sofian Tjandra, Christopher S. Olsen, Umesh M. Kelkar | 2015-09-01 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9123758 | Gas injection apparatus and substrate process chamber incorporating same | Agus Sofian Tjandra, Christopher S. Olsen, Umesh M. Kelkar | 2015-09-01 |