Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693435 | Ethercat liquid flow controller communication for substrate processing systems | Ricardo L. Martinez, Hung Xuan Hoang, Dmitry Sklyar, Farooq Aleem, Jagan Rangarajan +1 more | 2023-07-04 |
| 9735002 | Integrated apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Kin Pong Lo, Sandy M. Wen, Steven H. Kim | 2017-08-15 |
| 7655571 | Integrated method and apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Kin Pong Lo, Sandy M. Wen, Steven M. Kim | 2010-02-02 |