Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735002 | Integrated apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Kin Pong Lo, Brett Christian Hoogensen, Steven H. Kim | 2017-08-15 |
| 7655571 | Integrated method and apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Kin Pong Lo, Brett Christian Hoogensen, Steven M. Kim | 2010-02-02 |